Patent Assignment
Reel/Frame 045898/0915
Assignment of Assignor's Interest
Recorded: 2018-05-24
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Processing Method in Processing Apparatus Using Halogen-Based Gas