Patent Assignment
Reel/Frame 045928/0747
Assignment of Assignor's Interest
Recorded: 2018-05-30
Pages: 4
Assignors
KIKUMOTO, NORIYUKI
Executed: 2018-05-21
HAYASHI, TOYOHIDE
Executed: 2018-05-21
FUJITA, NAOTO
Executed: 2018-05-21
IWAO, MICHINORI
Executed: 2018-05-22
SAKAI, WATARU
Executed: 2018-05-21
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method