Patent Assignment
Reel/Frame 045943/0445
Assignment of Assignor's Interest
Recorded: 2018-04-13
Pages: 6
Assignors
SUN, JONGWOO
Executed: 2018-03-17
KIM, HAKYOUNG
Executed: 2018-03-17
JEON, YUN-KWANG
Executed: 2018-03-09
JEE, WONYOUNG
Executed: 2018-03-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Inspection Apparatus and Substrate Processing System Including the Same