Patent Assignment
Reel/Frame 045974/0359
Assignment of Assignor's Interest
Recorded: 2018-06-04
Pages: 3
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Position measuring device and method for determining positions of a measurement object