Patent Assignment
Reel/Frame 045987/0719
Assignment of Assignor's Interest
Recorded: 2018-06-05
Pages: 3
Assignor
MATSUURA, SHIN
Executed: 2018-06-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substratre Delivery Method and Substrate Processing Apparatus