Patent Assignment
Reel/Frame 045991/0487
Assignment of Assignor's Interest
Recorded: 2018-06-05
Pages: 2
Assignors
GELLINEAU, ANTONIO ARION
Executed: 2018-06-04
DZIURA, THADDEUS GERARD
Executed: 2018-05-29
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Process Monitoring Of Deep Structures With X-Ray Scatterometry