Patent Assignment
Reel/Frame 046016/0666
Assignment of Assignor's Interest
Recorded: 2018-06-07
Pages: 7
Assignors
DORIS, BRUCE B.
Executed: 2015-08-31
GUILLORN, MICHAEL A.
Executed: 2015-08-28
LAUER, ISAAC
Executed: 2015-09-02
MIAO, XIN
Executed: 2015-08-28
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Atomic Layer Deposition Sealing Integration for Nanosheet Complementary Metal Oxide Semiconductor with Replacement Spacer