Patent Assignment
Reel/Frame 046030/0199
Assignment of Assignor's Interest
Recorded: 2018-06-08
Pages: 5
Assignors
CHANG, CHUN-LIN LOUIS
Executed: 2018-04-16
FU, TZUNG-CHI
Executed: 2018-04-16
LIU, BO-TSUN
Executed: 2018-04-17
CHEN, LI-JUI
Executed: 2018-04-18
CHENG, PO-CHUNG
Executed: 2018-04-16
YI, WEI-TING
Executed: 2018-04-16
CHIEN, SHANG-CHIEH
Executed: 2018-04-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Source Generation Method and Related System