Assignment of Assignor's Interest

Recorded: 2018-06-08 Pages: 3

Assignors

NAGAMI, KOICHI

Executed: 2018-05-22

TORII, NATSUMI

Executed: 2018-05-23

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Plasma Processing Apparatus and Plasma Processing Method

Patent: 10,431,433 →

Application: 16/003,954 →

Publication: US 2018/0366305