Patent Assignment
Reel/Frame 046038/0718
Assignment of Assignor's Interest
Recorded: 2018-06-11
Pages: 10
Assignors
MANASSEN, AMNON
Executed: 2017-08-30
NEGRI, DARIA
Executed: 2018-02-16
HILL, ANDREW V.
Executed: 2017-06-15
BACHAR, OHAD
Executed: 2017-07-19
LEVINSKI, VLADIMIR
Executed: 2018-03-04
PASKOVER, YURI
Executed: 2018-03-04
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Systems and Methods for Metrology with Layer-Specific Illumination Spectra