Patent Assignment
Reel/Frame 046039/0262
Assignment of Assignor's Interest
Recorded: 2018-06-11
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Process-Induced Distortion Prediction During Wafer Deposition