Patent Assignment
Reel/Frame 046055/0655
Assignment of Assignor's Interest
Recorded: 2018-06-12
Pages: 5
Assignors
HATAKEYAMA, JUN
Executed: 2018-05-11
HASEGAWA, KOJI
Executed: 2018-05-11
FUKUSHIMA, MASAHIRO
Executed: 2018-05-11
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process