Patent Assignment
Reel/Frame 046057/0437
Assignment of Assignor's Interest
Recorded: 2018-06-12
Pages: 6
Assignors
TSUDA, EINOSUKE
Executed: 2018-05-25
MURAKAMI, SEISHI
Executed: 2018-05-28
KAMAISHI, TAKAYUKI
Executed: 2018-05-25
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Loading Mechanism