Patent Assignment
Reel/Frame 046092/0018
Assignment of Assignor's Interest
Recorded: 2018-06-14
Pages: 4
Assignors
MIYAGI, MASAHIRO
Executed: 2015-03-06
ARAKI, HIROYUKI
Executed: 2015-03-06
SUZUKI, MASANORI
Executed: 2015-03-10
SATO, TOMOKATSU
Executed: 2015-03-10
KAWASE, NOBUO
Executed: 2015-03-10
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Processing Fluid Supply Device, Substrate Processing Device, Processing Fluid Supply Method, Substrate Processing Method, Processing Fluid Processing Device, and Processing Fluid Processing Method