Patent Assignment
Reel/Frame 046177/0504
Assignment of Assignor's Interest
Recorded: 2018-06-22
Pages: 4
Assignors
WUISTER, SANDER FREDERIK
Executed: 2015-01-08
YILDIRIM, OKTAY
Executed: 2015-01-09
RISPENS, GIJSBERT
Executed: 2015-01-09
POLYAKOV, ALEXEY
Executed: 2015-01-08
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Lithographic Patterning Process and Resists to Use Therein