Patent Assignment
Reel/Frame 046181/0878
Assignment of Assignor's Interest
Recorded: 2018-06-22
Pages: 3
Assignors
CHERALA, ANSHUMAN
Executed: 2017-08-07
MEISSL, MARIO JOHANNES
Executed: 2018-06-08
CHOI, BYUNG-JIN
Executed: 2018-06-15
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, JAPAN
Covered Properties
(2)
Overlay Improvement in Nanoimprint Lithography
Overlay Improvement in Nanoimprint Lithography
Application:
62/539,300 →