Patent Assignment
Reel/Frame 046185/0571
Assignment of Assignor's Interest
Recorded: 2018-06-23
Pages: 7
Assignors
GEORGE, STEVEN M.
Executed: 2018-06-22
LEE, YOUNGHEE
Executed: 2018-03-23
JOHNSON, NICHOLAS
Executed: 2018-04-17
Assignee
THE REGENTS OF THE UNIVERSITY OF COLORADO, A BODY CORPORATE
1800 GRANT STREET, 8TH FLOOR, DENVER, COLORADO, 80203
Covered Property
(1)
Atomic Layer Etching Processes Using Sequential, Self-Limiting Thermal Reactions Comprising Oxidation and Fluorination