Patent Assignment
Reel/Frame 046192/0834
Assignment of Assignor's Interest
Recorded: 2018-06-25
Pages: 6
Assignors
ITO, SHUNICHI
Executed: 2018-06-18
HIMORI, SHINJI
Executed: 2018-06-18
ITO, ETSUJI
Executed: 2018-06-18
FURUYA, NAOKAZU
Executed: 2018-06-18
TAMAMUSHI, GEN
Executed: 2018-06-18
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Power Feed Member and Substrate Processing Apparatus