Patent Assignment
Reel/Frame 046240/0417
Assignment of Assignor's Interest
Recorded: 2018-06-29
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method of Achieving High Selectivity for High Aspect Ratio Dielectric Etch