Patent Assignment
Reel/Frame 046240/0951
Assignment of Assignor's Interest
Recorded: 2018-06-29
Pages: 5
Assignors
KIM, DO YOUNG
Executed: 2018-05-31
NA, JEONG-SEOK
Executed: 2018-05-31
LAI, CHIUKIN STEVEN
Executed: 2018-06-01
HUMAYUN, RAASHINA
Executed: 2018-06-01
DANEK, MICHAL
Executed: 2018-06-01
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Depositing Ruthenium Layers in Interconnect Metallization