Patent Assignment
Reel/Frame 046252/0265
Assignment of Assignor's Interest
Recorded: 2018-07-02
Pages: 4
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Repairing Defects of a Photolithographic Mask for the Euv Range