Patent Assignment
Reel/Frame 046258/0748
Assignment of Assignor's Interest
Recorded: 2018-07-03
Pages: 3
Assignors
LEE, YU-CHING
Executed: 2018-06-08
HUANG, TE-CHIH
Executed: 2018-06-08
FANG, YU-PIAO
Executed: 2018-06-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Multi-Function Overlay Marks for Reducing Noise and Extracting Focus and Critical Dimension Information