Patent Assignment
Reel/Frame 046273/0748
Assignment of Assignor's Interest
Recorded: 2018-07-05
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Control Method