Patent Assignment
Reel/Frame 046277/0702
Assignment of Assignor's Interest
Recorded: 2018-07-06
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask with Reduced Mask Shadowing Effect and Method of Manufacturing the Same