Patent Assignment
Reel/Frame 046278/0477
Assignment of Assignor's Interest
Recorded: 2018-07-06
Pages: 3
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method for Measuring Positions of Structures on a Substrate and Computer Program Product for Determining Positions of Structures on a Substrate