Patent Assignment
Reel/Frame 046278/0829
Assignment of Assignor's Interest
Recorded: 2018-07-06
Pages: 5
Assignor
KOBAYASHI, YOSHIYUKI
Executed: 2018-07-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Thermal Spraying Method of Component for Plasma Processing Apparatus and Component for Plasma Processing Apparatus