Patent Assignment
Reel/Frame 046293/0976
Assignment of Assignor's Interest
Recorded: 2018-07-09
Pages: 11
Assignors
GUTMAN, NADAV
Executed: 2018-05-18
AMIT, ERAN
Executed: 2018-06-30
EYRING, STEFAN
Executed: 2018-05-17
PATHANGI, HARI
Executed: 2018-05-16
LASKE, FRANK
Executed: 2018-06-19
POHLMANN, ULRICH
Executed: 2018-06-18
HEIDRICH, THOMAS
Executed: 2018-05-22
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Overlay Measurements of Overlapping Target Structures Based on Symmetry of Scanning Electron Beam Signals