Patent Assignment
Reel/Frame 046294/0567
Assignment of Assignor's Interest
Recorded: 2018-07-09
Pages: 8
Assignors
LASKE, FRANK
Executed: 2018-06-18
POHLMANN, ULRICH
Executed: 2018-06-18
EYRING, STEFAN
Executed: 2018-06-18
GUTMAN, NADAV
Executed: 2018-07-07
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Systems and Methods for Device-Correlated Overlay Metrology