Patent Assignment
Reel/Frame 046294/0852
Assignment of Assignor's Interest
Recorded: 2018-07-09
Pages: 6
Assignors
GOMI, ATSUSHI
Executed: 2014-12-18
MIYASHITA, TETSUYA
Executed: 2014-12-02
FURUKAWA, SHINJI
Executed: 2014-12-01
MAEDA, KOJI
Executed: 2014-12-02
HARA, MASAMICHI
Executed: 2014-12-18
SUZUKI, NAOYUKI
Executed: 2014-12-02
MIKI, HIROSHI
Executed: 2014-12-02
HIRATA, TOSHIHARU
Executed: 2014-12-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus