Patent Assignment
Reel/Frame 046310/0692
Assignment of Assignor's Interest
Recorded: 2018-07-10
Pages: 3
Assignors
GOPALAN, RAMESH
Executed: 2018-05-15
CHO, TOM K.
Executed: 2018-05-15
ALAJAJIAN, GEVORK
Executed: 2018-06-29
MARK, MICHAEL J.
Executed: 2018-05-15
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Measuring Concentrations of Radicals in Semiconductor Processing