Patent Assignment
Reel/Frame 046316/0753
Assignment of Assignor's Interest
Recorded: 2018-07-11
Pages: 4
Assignors
ABEL, JOSEPH
Executed: 2018-02-22
KUMAR, PURUSHOTTAM
Executed: 2018-02-20
VAN SCHRAVENDIJK, BART
Executed: 2018-07-10
LAVOIE, ADRIEN
Executed: 2018-02-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Dielectric Gapfill Using Atomic Layer Deposition (Ald), Inhibitor Plasma and Etching