Patent Assignment
Reel/Frame 046335/0890
Assignment of Assignor's Interest
Recorded: 2018-07-12
Pages: 4
Assignors
HATAZAKI, YOSHINARI
Executed: 2018-07-09
ISHIDA, WAKAKO
Executed: 2018-07-09
TANIGUCHI, KENSUKE
Executed: 2018-07-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method