Patent Assignment
Reel/Frame 046343/0579
Assignment of Assignor's Interest
Recorded: 2018-07-13
Pages: 5
Assignor
KOBAYASHI, DAI
Executed: 2018-06-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Mounting Table and Substrate Inspection Apparatus