Patent Assignment
Reel/Frame 046345/0710
Assignment of Assignor's Interest
Recorded: 2018-07-13
Pages: 3
Assignors
TUKKER, TEUNIS WILLEM
Executed: 2016-11-15
VAN DER ZOUW, GERBRAND
Executed: 2016-11-15
SINGH, AMANDEV
Executed: 2016-11-15
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Measurement System, Lithographic System, and Method Of Measuring a Target