Patent Assignment
Reel/Frame 046357/0940
Assignment of Assignor's Interest
Recorded: 2018-07-16
Pages: 4
Assignors
FREIMANN, ROLF
Executed: 2016-10-28
DOERBAND, BERND
Executed: 2016-11-02
HETZLER, JOCHEN
Executed: 2016-11-02
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Aligning a Mirror of a Microlithographic Projection Exposure Apparatus