Patent Assignment
Reel/Frame 046367/0932
Assignment of Assignor's Interest
Recorded: 2018-06-14
Pages: 3
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Electrostatic Chuck Mechanism and Semiconductor Processing Device Having the Same