Patent Assignment
Reel/Frame 046372/0027
Assignment of Assignor's Interest
Recorded: 2018-07-17
Pages: 3
Assignors
OKUNISHI, NAOHIKO
Executed: 2018-06-22
NAGASHIMA, NOZOMU
Executed: 2018-06-22
TAKAHASHI, TOMOYUKI
Executed: 2018-06-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus