Patent Assignment
Reel/Frame 046382/0470
Assignment of Assignor's Interest
Recorded: 2018-07-18
Pages: 3
Assignors
ZI, AN-REN
Executed: 2018-06-19
CHENG, JOY
Executed: 2018-06-20
CHANG, CHING-YU
Executed: 2018-06-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Metallic Resist Performance Enhancement via Additives