Patent Assignment
Reel/Frame 046397/0067
Assignment of Assignor's Interest
Recorded: 2018-07-19
Pages: 6
Assignors
KUBOTA, SHINJI
Executed: 2018-07-17
OKUNISHI, NAOHIKO
Executed: 2018-07-17
TAMURO, YOSUKE
Executed: 2018-07-17
KANEKO, SHOTA
Executed: 2018-07-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus