Patent Assignment
Reel/Frame 046398/0336
Assignment of Assignor's Interest
Recorded: 2018-07-19
Pages: 3
Assignors
SMITH, DAVID CHARLES
Executed: 2018-07-11
HENRI, JON
Executed: 2018-06-21
HAUSMANN, DENNIS M.
Executed: 2018-06-21
LEMAIRE, PAUL C.
Executed: 2018-06-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Growth of Metal-Containing Hardmask Thin Films