Patent Assignment
Reel/Frame 046415/0758
Assignment of Assignor's Interest
Recorded: 2018-07-20
Pages: 2
Assignor
KUWAHARA, JOJI
Executed: 2018-07-11
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Alignment Device, Substrate Processing Method and Alignment Method