Patent Assignment
Reel/Frame 046422/0815
Assignment of Assignor's Interest
Recorded: 2018-07-23
Pages: 4
Assignors
TANIZAWA, SHIGEKI
Executed: 2018-07-06
MIYAJI, NOBUYUKI
Executed: 2018-07-10
TAKAOKA, MAKOTO
Executed: 2018-07-10
SAWAZAKI, NAOKI
Executed: 2018-07-10
OKUMURA, TSUYOSHI
Executed: 2018-06-29
MIURA, ATSUYASU
Executed: 2018-07-10
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus