Patent Assignment
Reel/Frame 046430/0596
Assignment of Assignor's Interest
Recorded: 2018-07-23
Pages: 6
Assignors
OHASHI, MASAKI
Executed: 2018-06-18
HATAKEYAMA, JUN
Executed: 2018-06-18
ADACHI, TEPPEI
Executed: 2018-06-18
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Sulfonium Salt, Polymer, Resist Composition, and Patterning Process