Patent Assignment
Reel/Frame 046435/0261
Assignment of Assignor's Interest
Recorded: 2018-04-06
Pages: 5
Assignors
HSU, CHUN-CHIA
Executed: 2018-03-22
HSIEH, CHIEH
Executed: 2018-03-20
CHIEN, SHANG-CHIEH
Executed: 2018-03-20
CHEN, LI-JUI
Executed: 2018-03-20
CHENG, PO-CHUNG
Executed: 2018-03-22
FU, TZUNG-CHI
Executed: 2018-03-21
LIU, BO-TSUN
Executed: 2018-03-22
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
System and Method for Extreme Ultraviolet Source Control