Patent Assignment
Reel/Frame 046467/0517
Assignment of Assignor's Interest
Recorded: 2018-07-26
Pages: 3
Assignor
MIYAHARA, OSAMU
Executed: 2018-07-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium