Patent Assignment
Reel/Frame 046485/0989
Assignment of Assignor's Interest
Recorded: 2018-07-27
Pages: 7
Assignors
LANSALOT-MATRAS, CLEMENT
Executed: 2016-03-03
LEE, JOOHO
Executed: 2016-02-24
GIRARD, JEAN-MARC
Executed: 2016-03-22
BLASCO, NICOLAS
Executed: 2016-03-10
GATINEAU, SATOKO
Executed: 2018-07-17
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Etching Reactants and Plasma-Free Etching Processes Using the Same