Patent Assignment
Reel/Frame 046497/0343
Assignment of Assignor's Interest
Recorded: 2018-07-30
Pages: 8
Assignors
WANG, CHING-HUNG
Executed: 2018-06-26
LIU, PING-YIN
Executed: 2018-06-26
LIN, YEONG-JYH
Executed: 2018-06-26
TU, YEUR-LUEN
Executed: 2018-06-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Alignment, Process Tool and Method for Wafer-Level Alignment