Patent Assignment
Reel/Frame 046528/0480
Assignment of Assignor's Interest
Recorded: 2018-08-01
Pages: 2
Assignor
JING, CHANGYOU
Executed: 2018-07-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Real-Time Control of Temperature in a Plasma Chamber