Patent Assignment
Reel/Frame 046533/0700
Assignment of Assignor's Interest
Recorded: 2018-08-02
Pages: 4
Assignors
TAI, CHUN-LIANG
Executed: 2017-10-31
FAN, CHUN-HSIANG
Executed: 2017-10-31
HUANG, KUO-BIN
Executed: 2017-10-31
YEH, MING-HSI
Executed: 2017-10-31
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Substrate Vapor Drying Apparatus and Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.