Patent Assignment
Reel/Frame 046546/0412
Assignment of Assignor's Interest
Recorded: 2018-08-03
Pages: 4
Assignors
ABE, HIROSHI
Executed: 2018-07-13
OKUTANI, MANABU
Executed: 2018-07-13
OTA, TAKASHI
Executed: 2018-07-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Treatment Method and Substrate Treatment Apparatus